Light or laser, with the diverse spatial, temporal, and spectral properties, enables precise delivery of optical energy to induce photodynamic chemical and physical effects. Such light-matter interactions form the foundation for various micro/nano-processing techniques. Our work focuses on multi-physical field coupled laser micro/nano processing towards advanced manufacturing of integrated photonics/electronics. By leveraging the diverse chemical and physical effects that are interrelated or coupled in the interactions between laser and matters, we propose and implement a series of new mechanisms and methodologies for laser micro/nano processing with multiple degrees of freedom regarding functionalities. This report will mainly introduce our latest progresses in multi-physical laser micro/nano processing and bionic optics, including thermal photonic micro/nano-surfaces and all-optical bio-inspired mechanical cilia devices.

Laser Micro/nano-fabrication,Optical Biomimetic Surfaces,femtosecond laser processing,micro/nanostructure