High voltage SF6 circuit breaker must meet the breaking requirement for large short-circuit current, and ensure absence of breakdown after breaking small current. A 126kV high voltage SF6 circuit breaker was used as the research object in this paper. Based on the calculation results of non-equilibrium arc plasma material parameters, the distribution of pressure, temperature and density were calculated during the breaking progress. The electric field distribution was calculated in the course of flow movement, considering the influence of space charge on dielectric voltage. The change rule of the dielectric recovery progress was given based on the stream theory. The dynamic breakdown test circuit was built to measure the values of breakdown voltage under different open distance. The simulation results and experimental data are analyzed and the results show that: 1) Dielectric recovery speed (175kV/ms) is significantly faster than the voltage recovery rate (37.7kV/ms) during the arc extinguishing process. 2) The shorter the small current arcing time, the smaller the breakdown margin, so it is necessary to keep the arcing time longer than 0.5ms to ensure a large breakdown margin. 3) The calculated results are in good agreement with the experimental results. Since the breakdown voltage is less than the TRV in some test points, restrike may occur within 0.5ms after breaking, so arc extinguishment should be avoid in this time range.